Boone, Matthieu N.Matthieu N.BooneLaforce, BrechtBrechtLaforceMasschaele, BertBertMasschaeleSchaubroeck, DavidDavidSchaubroeckDierick, ManuelManuelDierickCnudde, VeerleVeerleCnuddeVekemans, BartBartVekemansVan Hoorebeke, LucLucVan HoorebekeVincze, LaszloLaszloVincze2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27894Combined 3D chemical and morphological characterization using an integrated systemProceedings paperhttp://meetingorganizer.copernicus.org/ICTMS2017/ICTMS2017-211.pdf