Deposition of a silicon oxide film showing enhanced surface passivation through negative fixed charges

Descamps, PierrePierreDescampsKaiser, VincentVincentKaiserBeaucarne, GuyGuyBeaucarneKuzma Filipek, IzabelaIzabelaKuzma FilipekDelamare,Delamare2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23755Deposition of a silicon oxide film showing enhanced surface passivation through negative fixed chargesOral presentation