2kV breakdown voltage GaN-on-Si DHFETs with sub-micron thick AlGaN Buffer

Srivastava, PuneetPuneetSrivastavaCheng, KaiKaiChengDas, JoJoDasVan Hove, MarleenMarleenVan HoveLeys, MaartenMaartenLeysMarcon, DenisDenisMarconVisalli, DomenicaDomenicaVisalliGeens, KarenKarenGeensDecoutere, StefaanStefaanDecoutereMertens, RobertRobertMertensBorghs, GustaafGustaafBorghs2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/215452kV breakdown voltage GaN-on-Si DHFETs with sub-micron thick AlGaN BufferProceedings paper