Weekers, BartBartWeekersBillen, MargoMargoBillenTabruyn, DriesDriesTabruynHaouari, RachidRachidHaouariGijsenbergh, PieterPieterGijsenberghRochus, VeroniqueVeroniqueRochusRottenberg, XavierXavierRottenbergLagae, LiesbetLiesbetLagae2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36315Electrode design for efficient excitation of vibrational modes in an ALN based PMUTOral presentationhttps://www.comsol.ch/paper/download/856831/Electrode%20Design%20for%20Efficient%20Excitation%20of%20Vibrational%20Modes%20in%20an%20AlN%20based%20PMUT.pdf