Khalilov, UmedjonUmedjonKhalilovPourtois, GeoffreyGeoffreyPourtoisvan Duin, AdryAdryvan DuinNeyts, ErikErikNeyts2021-10-202021-10-2020121932-7447https://imec-publications.be/handle/20.500.12860/20929Hyperthermal oxidation of Si(100)2x1 surfaces: effect of growth temperatureJournal article