Chandhok, ManishManishChandhokGoyal, SanjaySanjayGoyalCarson, SteveSteveCarsonPark, Seh-JinSeh-JinParkZhang, GuojingGuojingZhangMyers, AlanAlanMyersLeeson, MichaelMichaelLeesonKamna, MarilynMarilynKamnaMartinez, FabianFabianMartinezStivers, AlanAlanStiversLorusso, GianGianLorussoHermans, JanJanHermansHendrickx, EricEricHendrickxGovindjee, SanjaySanjayGovindjeeBrandstetter, GerdGerdBrandstetterLaursen, TodTodLaursen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15078Compensation of overlay errors due to mask bending and non-flatness for EUV masksProceedings paper