Variability sources in nanoscale bulk FinFETs and TiTaN- a promising low variability WFM for 7/5nm CMOS nodes

Bhoir, Mandar S.Mandar S.BhoirChiarella, ThomasThomasChiarellaRagnarsson, Lars-AkeLars-AkeRagnarssonMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchiMohapatra, Nihar R.Nihar R.Mohapatra2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32544Variability sources in nanoscale bulk FinFETs and TiTaN- a promising low variability WFM for 7/5nm CMOS nodesProceedings paper