Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

Proost, JorisJorisProostBaklanov, MikhaïlMikhaïlBaklanovMaex, KarenKarenMaexDelaey, L.L.Delaey2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4678Compensation effect during water desorption from siloxane-based spin-on dielectric thin filmsJournal article