Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaAbell, ThomasThomasAbellMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7674Buckling instabilities of thin cap layers deposited onto low-k dielectric filmsProceedings paper