Franquet, AlexisAlexisFranquetConard, ThierryThierryConardGilbert, MatthieuMatthieuGilbertHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120131742-6588https://imec-publications.be/handle/20.500.12860/22366Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)Journal article