Somervell, MarkMarkSomervellGronheid, RoelRoelGronheidHooge, JoshuaJoshuaHoogeNafus, KathleenKathleenNafusRincon Delgadillo, PaulinaPaulinaRincon DelgadilloThode, ChrisChrisThodeYounkin, ToddToddYounkinMatsunaga, KoichiKoichiMatsunagaRathsack, BenBenRathsackScheer, StevenStevenScheerNealy, PaulPaulNealy2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21528Comparison of directed self-assembly integrationsProceedings paper