Breuil, LaurentLaurentBreuilLisoni, JuditJuditLisoniBlomme, PieterPieterBlommeVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-2220140741-3106https://imec-publications.be/handle/20.500.12860/23583HfO2 based High-k inter-gate dielectrics for planar NAND flash memoryJournal articlehttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6678752