Radisic, AlexAlexRadisicLuhn, OleOleLuhnVaes, JanJanVaesArmini, SilviaSilviaArminiEl-Mekki, ZaidZaidEl-MekkiRadisic, DunjaDunjaRadisicRuythooren, WouterWouterRuythoorenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16070Copper plating for 3D interconnectsMeeting abstract