Influence of process-induced stress on device characteristics and its impact on scaled device performance

Smeys, PeterPeterSmeysGriffin, P. B.P. B.GriffinRek, Z. U.Z. U.RekDe Wolf, IngridIngridDe WolfSaraswat, K. C.K. C.Saraswat2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3834Influence of process-induced stress on device characteristics and its impact on scaled device performanceJournal article