Marinissen, Erik JanErik JanMarinissenDaenen, TomTomDaenenDupas, LucLucDupasVan Dievel, MarcMarcVan DievelHanaway, PeterPeterHanawayKiesewetter, JoergJoergKiesewetterSmith, KenKenSmithStrid, EricEricStridThaerigen, ThomasThomasThaerigen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19388Wafer probing on fine-pitch micro-bumps for 2.5D- and 3D-SICsOral presentationhttp://www.swtest.org/