Beyond BEOL interconnect wafer level monolithic near-infrared/infrared thin film photo diode image sensor integration

Li, YunlongYunlongLiCheyns, DavidDavidCheynsMoreno Hagelsieb, LuisLuisMoreno HagelsiebGeorgitzikis, EpimitheasEpimitheasGeorgitzikisLim, Myung jinMyung jinLimMao, MingMingMaoWitters, ThomasThomasWittersLeyssens, KennyKennyLeyssensBoulenc, PierrePierreBoulencLee, JiwonJiwonLeeMalinowski, PawelPawelMalinowskiGuerrieri, StefanoStefanoGuerrieri2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33439Beyond BEOL interconnect wafer level monolithic near-infrared/infrared thin film photo diode image sensor integrationProceedings paperhttps://iitc-conference.org/2019-iitc-mam-program/