Highly doped SiGe epitaxy in view of S/D applications

Rengo, GianlucaGianlucaRengoPorret, ClémentClémentPorretHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelNakazaki, NobuyaNobuyaNakazakiPourtois, GeoffreyGeoffreyPourtoisVantomme, AndreAndreVantommeLoo, RogerRogerLoo2021-10-292021-10-292020-07https://imec-publications.be/handle/20.500.12860/35823Highly doped SiGe epitaxy in view of S/D applicationsMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/140141