Nigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveHeyns, MarcMarcHeynsGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2807Influence of Boron diffusion on reliability of ultra-thin oxidesOral presentation