Simulation of the anneal of ion implanted boron emitter and the impact on the saturation current density

Florakis, AntoniosAntoniosFlorakisJanssens, TomTomJanssensRosseel, ErikErikRosseelDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteCornagliotti, EmanueleEmanueleCornagliottiPoortmans, JefJefPoortmansVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20684Simulation of the anneal of ion implanted boron emitter and the impact on the saturation current densityProceedings paper