Van Elshocht, SvenSvenVan ElshochtHardy, AnAnHardyWitters, ThomasThomasWittersAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardVan Bael, MarliesMarliesVan BaelMullens, J.J.MullensHeyns, MarcMarcHeyns2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13049Aqueous chemical solution deposition: a fast screening method for alternative high-k materials applied to Nd2O3 as a case studyJournal article