Henderick, LowieLowieHenderickHamed, HamidHamidHamedMatteraer, FelixFelixMatteraerMinjauw, MatthiasMatthiasMinjauwMeersschaut, JohanJohanMeersschautDendooven, JolienJolienDendoovenSafari, MomoMomoSafariVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2021-10-282021-10-2820201944-8244https://imec-publications.be/handle/20.500.12860/35262Atomic layer deposition of nitrogen doped Al-phosphate coatings for Li-ion battery applicationsJournal articlehttps://pubs.acs.org/doi/10.1021/acsami.0c05585