Halder, SandipSandipHalderDe Wolf, IngridIngridDe WolfPhommahaxay, AlainAlainPhommahaxayMiller, AndyAndyMillerMaenhoudt, MireilleMireilleMaenhoudtBeyer, GeraldGeraldBeyerSwinnen, BartBartSwinnenBeyne, EricEricBeyne2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20769In-line metrology and inspection for process control during 3D stacking of IC�sProceedings paper