Phosphorus incorporation and defect morphology optimisation for n-type diamond growth

Nicley, ShannonShannonNicleyPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27078Phosphorus incorporation and defect morphology optimisation for n-type diamond growthOral presentation