Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification

Perez Lozano, DanielDanielPerez LozanoMongillo, MassimoMassimoMongilloPiao, XiaoyuXiaoyuPiaoCouet, SebastienSebastienCouetWan, DannyDannyWanCanvel, YannYannCanvelAnanthapadmanabha Rao, VadirajVadirajAnanthapadmanabha RaoIvanov, TsvetanTsvetanIvanovVerjauw, JeroenJeroenVerjauwAcharya, RohithRohithAcharyaVan Damme, JacquesJacquesVan DammeMohiyaddin, Fahd AyyalilFahd AyyalilMohiyaddinJussot, JulienJulienJussotPuttarame Gowda, PallaviPallaviPuttarame GowdaPacco, AntoineAntoinePaccoRaes, B.B.Raesvan de Vondel, J.J.van de VondelRadu, IulianaIulianaRaduGovoreanu, BogdanBogdanGovoreanuSwerts, JohanJohanSwertsPotocnik, AntonAntonPotocnikDe Greve, KristiaanKristiaanDe Greve2024-10-302024-10-302024-JUN 12633-4356WOS:001339740900001https://imec-publications.be/handle/20.500.12860/44705Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modificationJournal article10.1088/2633-4356/ad4b8cWOS:001339740900001SUPERCONDUCTING CIRCUITSTUNNEL-JUNCTIONSTARESISTIVITYNIOBIUMFILMSNB