van der Heide, PaulPaulvan der HeideSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetZborowski, CharlotteCharlotteZborowskiConard, ThierryThierryConardLudwig, JonathanJonathanLudwigParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorstPirkl, AlexanderAlexanderPirklNiehuis, EwaldEwaldNiehuis2021-10-292021-10-2920200142-2421https://imec-publications.be/handle/20.500.12860/36141Surface analysis in the semiconductor industry: Present use and future possibilitiesJournal articlehttps://doi.org/10.1002/sia.6766