Das, ArabindaArabindaDasLe, Quoc ToanQuoc ToanLeFurukawa, YukikoYukikoFurukawaNguyen Hoang, VietVietNguyen HoangTerzieva, ValentinaValentinaTerzievade Theije, FemkeFemkede TheijeWhelan, CarolineCarolineWhelanMaenhoudt, MireilleMireilleMaenhoudtStruyf, HerbertHerbertStruyfTokei, ZsoltZsoltTokeiIacopi, FrancescaFrancescaIacopiStucchi, MicheleMicheleStucchiCarbonell, LaureLaureCarbonellVos, IngridIngridVosBender, HugoHugoBenderPatz, M.M.PatzBeyer, GeraldGeraldBeyerVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7379Characterisation of JSR's spin-on hardmask FF-02Journal article