Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residues

Le, Quoc ToanQuoc ToanLede Marneffe, Jean-FrancoisJean-Francoisde MarneffeConard, ThierryThierryConardVaesen, IngeIngeVaesenStruyf, HerbertHerbertStruyfVereecke, GuyGuyVereecke2021-10-202021-10-2020120013-4651https://imec-publications.be/handle/20.500.12860/20990Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residuesJournal article