High quality, relaxed SiGe epitaxial layers for solar cell application

Said, KhalidKhalidSaidPoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxLoo, RogerRogerLooDaami, A.A.DaamiBremond, G.G.BremondKruger, O.O.KrugerKittler, M.M.Kittler2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3791High quality, relaxed SiGe epitaxial layers for solar cell applicationJournal article