3D features measurement using YieldStar, an angle resolved polarized scatterometer

Charley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLerayD'have, KoenKoenD'haveCheng, ShauneeShauneeChengHinnen, PaulPaulHinnenLi, FahongFahongLiVanoppen, PeterPeterVanoppenDusa, MirceaMirceaDusa2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/186543D features measurement using YieldStar, an angle resolved polarized scatterometerProceedings paper