Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beams

Pureti, RathaiahRathaiahPuretiVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120130142-2421https://imec-publications.be/handle/20.500.12860/22961Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beamsJournal article10.1002/sia.5049