de Marneffe, Jean-FrancoisJean-Francoisde MarneffeMarinov, D.D.MarinovGoodyear, A.A.GoodyearWyndaele, Pieter-JanPieter-JanWyndaeleSt. J. Braithwaite, N.N.St. J. BraithwaiteKundu, S.S.KunduAsselberghs, IngeIngeAsselberghsCooke, M.M.CookeDe Gendt, StefanStefanDe Gendt2022-09-012022-06-152022-09-0120220734-2101WOS:000804453900001https://imec-publications.be/handle/20.500.12860/39951Plasma enhanced atomic layer etching of high-k layers on WS2Journal article10.1116/6.0001726WOS:000804453900001MOS2DEPOSITIONHFO2