AlGaN/GaN HEMT : when MOVPE meets the device challenge

Germain, MarianneMarianneGermainLeys, MaartenMaartenLeysBoeykens, StevenStevenBoeykensCheng, KaiKaiChengDegroote, StefanStefanDegrooteDerluyn, JoffJoffDerluynDas, JohanJohanDasVandersmissen, RafRafVandersmissenWang, WenfeiWenfeiWangXiao, DongpingDongpingXiaoBorghs, GustaafGustaafBorghs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10495AlGaN/GaN HEMT : when MOVPE meets the device challengeProceedings paper