Baklanov, MikhaïlMikhaïlBaklanovde Marneffe, Jean-FrancoisJean-Francoisde MarneffeShamiryan, D.D.ShamiryanUrbanowicz, A.A.UrbanowiczShi, H.H.ShiRakhimova, T.V.T.V.RakhimovaHuang, H.H.HuangHo, P.S.P.S.Ho2021-10-212021-10-2120130021-8979https://imec-publications.be/handle/20.500.12860/22014Plasma processing of low-k dielectricsJournal article