A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing

Pamidighantam, SayanuSayanuPamidighantamLaureyn, WimWimLaureynSalah, AhmedAhmedSalahVerbist, AgnesAgnesVerbistTilmans, HarrieHarrieTilmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6689A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacingProceedings paper