Nagano, FuyaFuyaNaganoIacovo, SerenaSerenaIacovoPhommahaxay, AlainAlainPhommahaxayInoue, FumihiroFumihiroInoueSleeckx, ErikErikSleeckxBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Gendt, StefanStefanDe Gendt2022-01-102021-11-022022-01-1020202162-8769WOS:000602991700001https://imec-publications.be/handle/20.500.12860/38304Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding ApplicationsJournal article10.1149/2162-8777/abd260WOS:000602991700001SOLDER JOINTSSURFACETECHNOLOGYSICN