Ogawa, YuichiYuichiOgawaIino, HideakiHideakiIinoFukui, TakeoTakeoFukuiOniki, YusukeYusukeOnikiAkanishi, YuyaYuyaAkanishiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33688Study on La2O3 wet clean by pH controlled functional waterProceedings paperhttp://ecst.ecsdl.org/content/92/2/21