An O/E measurement probe based on an optics-extended MCM-D motherboard technology

De Pauw, HerbertHerbertDe PauwDe Baets, JohanJohanDe BaetsVanfleteren, JanJanVanfleterenVan Calster, AndreAndreVan Calster2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6210An O/E measurement probe based on an optics-extended MCM-D motherboard technologyProceedings paper