Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology

Put, SofieSofiePutSimoen, EddyEddySimoenVan Huylenbroeck, StefaanStefaanVan HuylenbroeckClaeys, CorCorClaeysVan Uffelen, NickNickVan UffelenLeroux, P.P.Leroux2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14347Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technologyProceedings paper