Optimization of cleaning processes for 100 nm and smaller design rules

Xu, KaidongKaidongXuVos, RitaRitaVosHolsteyns, FrankFrankHolsteynsKenis, KarineKarineKenisVereecke, GuyGuyVereeckeMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5849Optimization of cleaning processes for 100 nm and smaller design rulesOral presentation