Transfer-print integration of GaAs p-i-n photodiodes onto silicon nitride waveguides for near-infrared applications

Goyvaerts, JeroenJeroenGoyvaertsKumari, SulakshnaSulakshnaKumariUvin, SarahSarahUvinZhang, JingJingZhangBaets, RoelRoelBaetsGocalinska, AgnieszkaAgnieszkaGocalinskaPelucchi, EmanueleEmanuelePelucchiCorbett, BrianBrianCorbettRoelkens, GuntherGuntherRoelkens2021-10-282021-10-282020-071094-4087https://imec-publications.be/handle/20.500.12860/35199Transfer-print integration of GaAs p-i-n photodiodes onto silicon nitride waveguides for near-infrared applicationsJournal articlehttps://doi.org/10.1364/OE.395796