Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors

Polspoel, WouterWouterPolspoelVandervorst, WilfriedWilfriedVandervorstAguilera, LidiaLidiaAguileraPorti, MarcMarcPortiNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14329Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitorsOral presentation