Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activation

Vohra, AnuragAnuragVohraKhanam, AfrinaAfrinaKhanamSlotte, JonatanJonatanSlotteMakkonen, IljaIljaMakkonenPourtois, GeoffreyGeoffreyPourtoisPorret, ClémentClémentPorretLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-2720190021-8979https://imec-publications.be/handle/20.500.12860/34400Heavily phosphorus doped germanium: strong relationship of phosphorus with vacancies and impact of Sn alloying on doping activationJournal article10.1063/1.5107503