Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDe Wolf, PeterPeterDe WolfEyben, PierrePierreEybenHaegeman, BartBartHaegemanXu, MingweiMingweiXuTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelStephenson, RobertRobertStephensonConard, ThierryThierryConardDe Witte, HildeHildeDe Witte2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3961High resolution dopant/carrier profiling for deep submicron technologiesOral presentation