Ponomarev, YouriYouriPonomarevLoo, JosineJosineLooRittersma, ChrisChrisRittersmaLander, RobRobLanderHooker, JacobJacobHookerDoornbos, GerbenGerbenDoornbosSurdeanu, RaduRaduSurdeanuCubaynes, FlorenceFlorenceCubaynesDachs, CharlesCharlesDachsKubicek, StefanStefanKubicekHenson, KirklenKirklenHensonLindsay, RichardRichardLindsay2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8032A practical baseline process for advanced CMOS devices researchProceedings paper