Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node

Chehab, BilalBilalChehabZografos, OdysseasOdysseasZografosDentoni Litta, EugenioEugenioDentoni LittaAhmed, ZubairZubairAhmedSchuddinck, PieterPieterSchuddinckJang, DoyoungDoyoungJangHellings, GeertGeertHellingsSpessot, AlessioAlessioSpessotWeckx, PieterPieterWeckxRyckaert, JulienJulienRyckaert2022-06-172022-05-052022-05-172022-06-1720212380-632XWOS:000784773200057https://imec-publications.be/handle/20.500.12860/39737Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology nodeProceedings paper10.1109/IITC51362.2021.9537557978-1-7281-7632-1WOS:000784773200057