Croon, JeroenJeroenCroonLeunissen, PeterPeterLeunissenJurczak, GosiaGosiaJurczakBenndorf, MichaelMichaelBenndorfRooyackers, RitaRitaRooyackersRonse, KurtKurtRonseDecoutere, StefaanStefaanDecoutereSansen, WillyWillySansenMaes, HermanHermanMaes2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7365Experimental investigation of the impact of line-edge roughness on MOSFET performance and yieldProceedings paper