Chen, JerryJerryChenCartier, EduardEduardCartierCarter, RichardRichardCarterKauerauf, ThomasThomasKaueraufZhao, ChaoChaoZhaoPétry, JasmineJasminePétryCosnier, VincentVincentCosnierXu, ZhenZhenXuKerber, AndreasAndreasKerberTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoungKubicek, StefanStefanKubicekCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsCopel, M.M.CopelBesling, WimWimBeslingBajolet, PhilippePhilippeBajoletMaes, JanJanMaes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6100Thermal stability and scalability of zr-aluminate-based high-k gate stacksProceedings paper