Vincent, BenjaminBenjaminVincentLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstDelmotte, JorisJorisDelmotteDouhard, BastienBastienDouhardValev, VentislavVentislavValevVanbel, MaartenMaartenVanbelVerbiest, ThierryThierryVerbiestRip, JensJensRipBrijs, BertBertBrijsConard, ThierryThierryConardClaypool, ChrisChrisClaypoolTakeuchi, ShotaroShotaroTakeuchiZaima, ShigeakiShigeakiZaimaMitard, JeromeJeromeMitardDe Jaeger, BriceBriceDe JaegerDekoster, JohanJohanDekosterCaymax, MattyMattyCaymax2021-10-192021-10-1920110038-1101https://imec-publications.be/handle/20.500.12860/20097Si passivation for Ge pMOSFETs: impact of Si cap growth conditionsJournal article