Doise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanLin, GuanyangGuanyangLinGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25219Influence of film thickness and pattern density in graphoepitaxial DSAProceedings paper