Non-selective and selective thin SiGe strain-relaxed buffer layers: growth and carbon-induced relaxation

Caymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougneRies, MichaelMichaelRiesLuysberg, MartinaMartinaLuysbergLoo, RogerRogerLoo2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10199Non-selective and selective thin SiGe strain-relaxed buffer layers: growth and carbon-induced relaxationProceedings paper